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| Specification | S-4700-I |
| Vintage | |
| E-beam Resolution | 1.5nm @15KV / 2.1nm @ 1kV |
| Stage | 2 Axis, Motorized |
| Stage Travel | 25 x 25 mm |
| Z, R | 26.5mm, 360 deg |
| Tilt | -5 - +45 |
| Sample Entry | LL - 4" - 100mm |
| Chamber View | Yes |
| OS | Win XP Pro |
| Vacuum | DP |
| EDX | Optional |
| BSE | Optional |
| STEM | Optional |